In a surprising new study, researchers at the University of Minnesota Twin Cities have found that the electron beam radiation that they previously thought degraded crystals can actually repair cracks ...

San Jose, Calif. – New tools based on electron-beam and nanomachining technologies are coming to the mask repair market, complementing traditional tools based on focused ion beams and lasers . Vendors ...

For years, the biggest challenges in photomask manufacturing have revolved around the slow write times for electron-beam tools and soaring mask inspection costs. Now, photomask repair, a sometimes ...

“Mask repair is an essential step in the manufacturing process of extreme ultraviolet (EUV) masks. Its key challenge is to continuously improve resolution and control to enable the repair of the ...